Precision Processing Technology
HANA Etching Processing offers your solutions
Etching Technology
Hana AMT Co., Ltd. possesses precise and uniform ethcing technology using the Side-Spray method.
The side-spray method can maintain high quality compared to domestic general top-spray etching.
- Etching solution flows from top to bottom and etching proceeds
- Relatively high productivity compared to side-spray
- During the TGV formation process, the uniformity of hole formation is poor due to the process characteristics
- Pattern etching accuracy is greatly reduced due to process characteristics
- Etching is carried out by spraying the etching solution evenly from the side
- Excellent overall etching quality compared to top-spray
- Small tolerance due to characteristics during pattern formation processes such as TGV
- Precision fine pattern etching is possible, and precision and uniformity are excellent when processing holes and fine patterns such as TGV
Side-spray method is suitable
⇒ for fabrication of high uniformity TGV-forming glass interposer
Securing
Formation
of
uniform TGV
Improvement and advancement of final product quality
| Item | Specification | Remarks |
|---|---|---|
| Alignment Mark Size | ±80㎛ | Drilled circle |
| Alignment Mark Circularity | ±50㎛ | |
| Alignment Mark to Edge Tolerance | ±100㎛ | |
| Alignment Mark to Alignment Mark Position Tolerance. | ±50㎛ | |
| Alignment Mark for diagonal Position/Tolerance | ±50㎛ | |
| Cell Position Tolerance (Align Mark to each edge of cavities) | ±170㎛ | |
| Cell Size Tolerance (deu-side) | ±170㎛ | |
| Depth Tolerance of Cavity | ±50㎛ | |
| R-shape of cell bottom | ≤ cell depth+0.1㎜ | |
| Cavity Roughness | < 0.02㎛ | Ra base |
| Glass Material | Max 920×730㎜ | |
| Glass Size | Max 5㎜ | |
| Glass Thickness | 0.035/0.5/0.55/0.7/1.1mm |
AMT BIO Chip Technology
Microfluidics & Lab on a chip
Biochips for culturing cells, tissue or microorganisms are of interest to several (bio)medical and pharmaceutical applications such as tissue
engineering, organ-on-a-chip and high-throughput drug screening.
Due to glass properties, microfluidic glass products are superior to PDMS resin ones in terms of thermal and chemical resistance.
Ultra Thin Glass(UTG) Technology
